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High Resistivity:
p-type : 0.015ohm.cm (~5e18) to 80ohm.cm
n-type : 0.1ohm.cm (~2e17) to 80ohm.cm
All Res greater than 40ohm.cm measured by mercury probe.
Processes:
Standard High Temp p-type process, >950 Deg C; 5e18, on thicknesses of 0.5um and above
Standard Low Temp p-type process <950 Deg C; 2e19, for thin layers less than 0.5um
In-Situ Doping (ISD) p-type, 5e17 to 2e19.
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